A Low-Power Integrated Micromachined Gas Micropump
Hanseup Kim, Aaron Astle, Khalil Najafi, Luis Bernal, Peter Washabaugh
Summer 2005 issue of WIMS World
A four-stage peristaltic pump structure designed as proof-of-concept for a multi-stage (18-stage) gas micropump for use in a micro gas chromatography (?GC) system has been developed. The fabricated pump successfully integrates...
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